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The cleanliness of indium tin oxide (ITO) substrates used in organic light-emitting diodes (OLEDs) is investigated by contact angle measurement and by X-ray photoemission spectroscopy (XPS). It was found that ultraviolet (UV) ozone treatment is quite effective in removing organic contamination on the ITO surface. The degree of surface contamination was checked by changes in contact angles and by XPS. Strong correlation can be established between these two techniques. OLEDs fabricated from UV-irradiated ITO substrates exhibit low turn-on voltage and superior brightness.