The density of plasma produced by atmospheric non-equilibrium plasma source is the function of energy dissipation rate in ionization electric field and gas particles momentum. The experiment shows that the plasma density highly rises with the increasing of energy dissipation rate and gas particles momentum. When the energy dissipation rate of activation field is 2.18 Wh/m3 and the average gas particles momentum is 109×10−22 g·m/s, the air throughput of plasma source whose volume is only 2.5 cm3 can be up to 12 m3/h and the density of plasma can be up to 1010 cm−3. The research can develop a method of producing minitype plasma source which is low energy consumption but high ion concentration used for chemical industry, environmental engineering and military.