In this paper, a singular integral equation method is applied to calculate the stress intensity factor along crack front of a 3D inclined semi-elliptical surface crack in a semi-infinite body under tension. The stress field induced by displacement discontinuities in a semi-infinite body is used as the fundamental solution. Then, the problem is formulated as a system of integral equations with singularities of the form r −3. In the numerical calculation, the unknown body force doublets are approximated by the product of fundamental density functions and polynomials. The results show that the present method yields smooth variations of mixed modes stress intensity factors along the crack front accurately for various geometrical conditions. The effects of inclination angle, elliptical shape, and Poisson's ratio are considered in the analysis. Crack mouth opening displacements are shown in figures to predict the crack depth and inclination angle. When the inclination angle is 60 degree, the mode I stress intensity factor F I has negative value in the limited region near free surface. Therefore, the actual crack surface seems to contact each other near the surface.