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This paper reports a piezoelectric nanogenerator (NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide (ZnO) thin film, a magnetron sputtering machine was used. Polymethyl methacrylate (PMMA) and aluminum-doped zinc oxide (AZO) were used as the insulating layer and the top electrode of the NG, respectively. The experimental...
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