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Cobalt antimony thin films were deposited on flexible substrates at room temperature by radio frequency magnetron sputtering with different sputtering power. The atomic ratio of Co to Sb in the cobalt antimony thin film was closest to 1:3 when the sputtering power was 55 W. The thermoelectric properties of the thin films deposited at room temperature were inconspicuous due to their amorphous microstructure...
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