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In this paper, the nonlinear size-dependent static and dynamic behavior of an electrostatically actuated nano-beam is investigated. A fully clamped nano-beam is considered for the modeling of the deformable electrode of the NEMS. The governing differential equation of the motion is derived using Hamiltonian principle based on couple stress theory; a non-classical theory for considering length scale...
The impetus of the study is to present a novel micro electro mechanical system based tunable gyroscope with the possibility of sensitivity enhancement using appropriate electrostatic hopping voltages. The proposed model is a silicon-based clamped–clamped micro beam sandwiched with two piezoelectric layers throughout the entire length. The nonlinear electrostatic forces are applied to the micro beam...
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