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The effects of process parameters such as O2/HMDSN (hexamethyldisilazane) ratio, microwave discharge power and deposition pressure on the growth rate, chemical bonding nature, and refractive index of thin films deposited by microwave plasma from HMDSN with oxygen, have been investigated. The plasma was created in a Microwave Multipolar reactor excited by Distributed Electron Cyclotron Resonance. The...
Polymerization of acrylic acid with hexamethyldisilazane (HMSZ) was carried out in a mixture by use of pulsed and continuous wave plasmas. The polymer deposition rate and the chemical structures of product films were investigated with regard to the power effects of the plasmas. A copolymer-like structure was formed in general, but the products were not necessarily composed of the simple agglomeration...
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