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We developed a new X-ray lithography system for the lithographite, galvanoformung and abformung (LIGA) process using synchrotron radiation at the New SUBARU facility of the University of Hyogo. The X-ray lithography system can utilize two different energy regions: one is a high-energy region: from 2 to 12 keV, and the other is a low-energy region from 1 to 2 keV. Each energy region can be selected...
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