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This paper describes polidimethylsiloxane(PDMS) based bonding for assembly of microstructure device, an UV lithography applications for fabricating a 3-dimensional (3D) feed-horn-shaped structure mold array, and obtaining parallel light by using a mirror-reflected parallel-beam illuminator (MRPBI) system. A 3D feed-horn-shaped micro-electro-mechanical systems (MEMS) antenna has some attractive features...
For a safe design of micromechanical components reliable data of mechanical properties at static and cyclic loadings are of vital interest. Such data together with a detailed analysis of the microstructure are also useful for a straight forward optimization of the manufacturing process. Therefore, in the present study the mechanical behavior of microcast Stabilor-G® microspecimens under quasistatic...
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