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In this work, we present the fabrication process of a large (100mmx40mm) and thick (30mm) single order diffraction grating with a very flat reflecting surface. This grating is designed for a soft X-ray monochromator. Three single order diffraction gratings with different line densities were integrated on one silicon plate. The gratings are patterned on a 6.35mm thick substrate using direct e-beam...
Silicon-based MEMS microthruster matrix has gained great attention as a micro-impulsion system in recent years, especially in application of attitude control of the nanosatellites. Although silicon serves well as the structural material for microthruster matrix in several aspects, its ability to resist ablation is rather weak. In this paper, SiC membrane is introduced to the surface of micro-chambers...
This paper presents the temperature influence on the adhesion of a copper thin film deposited on an alumina substrate. 5μm and 20 μm thicknesses of copper films were deposited by RF sputtering and characterized. Simulation and mechanical characterizations were realized. Results obtained by Stoney stresses and by Von Mises Stress show stresses relaxation after first annealing and their stabilization...
Fluorescence thermography[1] uses the property of fluorescent dyes to lower their fluorescence emission intensity with the temperature. By using a diblock molecule, Poly-L-Lysine grafted with Fluorescein isothiocyanate (FITC), it is possible to coat a surface with a thin layer of fluorescent dye and to use temperature variations of the fluorophore to measure a temperature map at small scale on a dry...
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