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Sheet resistance of transition metal thin getter films was recorded during activation at 250°C-1h15 by in-situ 4-probes measurement under vacuum. Co-evaporated alloys of Zr-V, Zr-Ti, Zr-Co with different compositions were studied. Results show that resistivity and temperature coefficient of resistance (TCR) are linked and follow the Mooij rule. Several degrees in structure disorder were deduced from...
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