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FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50–150 nm in diameter with 15–20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic...
We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with < 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry...
We have developed an inexpensive inkjet printing process to fabricate percolation-based resistive strain gauges in a paper substrate. These strain sensors were fabricated by inkjet printing different suspensions containing conductive carbon black (CB). We have measured the resistance of these elements as a function of strain under low frequency cyclic loads to characterize the sensitivity of these...
This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type...
We report a flexible electrocorticogram (ECoG) electrode array device with one directionally self-curling and -sticking properties, to solve the difficulty of the handling of thin (< 10 μm) substrate devices (Fig. 1). As the substrate, we use sandwiched parylene-N/-C which films have different linear expansion coefficients. The thermal dependences of the deflection and curvature radius of the paylene-N/-C...
Here we present a method to strongly reduce the oxidation of conductive polycrystalline silicon carbide (poly-SiC) layers. We employed a thin (45 nm) layer of aluminum oxide (Al2O3) as protective coating against oxidation. This layer was deposited by atomic layer deposition (ALD) to achieve a high quality and conformal coating. Microheaters made of nitrogen doped poly-SiC (poly-SiC:N) were oxidized...
This paper describes the effects of specimen size, focused ion beam (FIB) damage, and annealing on the mechanical properties of sub-100nm-size silicon (Si) nanowires (NWs) evaluated by direct tensile testing. Si NWs were made from silicon-on-nothing (SON) membranes that were produced by deep reactive ion etching (DRIE) trench fabrication and ultra-high vacuum (UHV) annealing. FIB system's probe manipulation...
In this contribution we present a scanning probe with a gold-tip completely encapsulated with insulator all the way to the apex. The probe fabrication is unique owing to an in-plane arrangement in which the width of the cantilever is defined by deep reactive ion etching (DRIE). E-beam lithography was employed for defining the gold nanowire tip. The cantilever and the chip body were defined by DRIE...
Carbon nanotubes can withstand large elastic deformation and show pronounced piezoresistive effects which make them promising candidates for low-power strain sensors in the large strain regime. Integration of individual suspended nanotubes into complex microelectromechanical devices, including gate structures, is still a challenge. Here, ultraclean carbon nanotubes spanning across actuated MEMS electrodes...
This paper reports a compact optical wavelength tracker, which consists of an electrically controlled tunable micro-ring resonator and a flip-chip bonded photodiode. The input optical wavelength is measured and the wavelength change is tracked by analyzing the photocurrent variation of the photodiode. This wavelength tracker has compact size (0.5 mm × 1.5 mm), high resolution (3 pm), cost-effective...
An optically controllable photocathode array made of Si with carbon nanotubes (CNTs) has been developed. The CNTs were grown on apex of Si tips with pn junction. The Si tips were formed on a Si membrane. Laser intensity dependence on IV characteristics of this photo cathode array has been measured. Electron emission can be switched on by laser irradiation, and the emission current also can be controlled...
We demonstrate the fabrication and improvements of our next generation Thermoelectric Nanowire Characterization Platform (TNCP) that is utilized to investigate the thermoelectric properties of individual nanowires to obtain the Seebeck coefficient S, electrical conductivity σ and thermal conductivity κ from the same test specimen. Only from these data, the so-called figure of merit ZT can be obtained...
We have developed a highly sensitive, transparent and flexible toluene sensor using cobalt-metalloporphyrin (Co-MPP)-functionalized graphene as sensing material. The functionalization of MPP enhanced responsiveness (ΔR/Ri) over 200% compared to pristine graphene toward 10 ppm of toluene molecules at room temperature, while it still revealed optical transmittance and mechanical flexibility.
We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off...
Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium nitride (TiN) deposited using atomic layer deposition (ALD). By hollowing the tip of the relay, a flexible sidewall is formed from the thin TiN that results in a larger contact area and therefore improves the contact properties...
This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external...
An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between...
This paper proposes a pantograph mechanism to convert swelling motion of pneumatic balloon actuator (hereafter PBA) into linear contraction motion. PBA swells in nature by internal pressurization. Bending PBA, which was previously proposed, converts swelling into bending motion by bimorph mechanism. In addition, we reported conversion from bending motion of PBA into contraction elsewhere. This paper...
This paper reports fabrication results of a microactuator array on a flexible sheet. The design was based on the concept of “smart MEMS sheet”, a flexible version of autonomous decentralized MEMS. The fabricated actuator array consists of thermally driven cantilever actuators (ciliary actuators) and the flexible sheet is Kapton® sheet. Both are made of Polyimide, a flexible material. We succeeded...
Zinc/platinum (Zn/Pt) bimetallic micromotors have been developed. They moved based on the reduction of fuel compounds such as bromine, p-benzoquinone, and methanol at the surface of the Pt and the oxidation (dissolution) of Zn that occur simultaneously. The redox potential of Zn2+/Zn is very negative and was advantageous to cause the redox reactions. The motion of the motor and the reactions that...
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