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We propose and experimentally demonstrate a novel method to fabricate subwavelength silica nanocone arrays with high aspect ratio (∼7) for multifunctional surfaces having anti-reflective, self-cleaning, and anti-fogging properties.
We present wafer-scale processed optomechanical oscillators with low threshold power (<120μW) owing to high Qoptical = 5.3M, with phase noise of −110dBc/Hz (10kHz offset, 18.6MHz carrier). Phase noise is modeled, and measured vs. Qoptical and Qmechanical.
We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.
A conical micromirror is shown to increase the signal from fluorescent molecules within a collocated subwavelength metal aperture by 5×. Large-scale integration (75,000 miromirrors/aperture pairs) is demonstrated.
Multimode interference (MMI) waveguides-based photonic modulators integrated on silicon-on-insulator (SOI) substrates are designed, fabricated and evaluated. With 100% modulation depth achieved, the lowest rise and fall times were respectively measured to be 52 and 48 ns. The highest 3 dB bandwidth in the excess of 6.5 MHz was determined from the corresponding devices.
Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.
Implementation of a MEMS-based Wolter type-I optic that is suitable for future planetary exploration missions is described. A devised alignment system permits independent adjustment of position and angular settings of x-ray mirrors.
An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted...
Simulations and fabrication of two novel multimorph based in-plane actuator designs are reported. The ∼1mm in-plane displacement capability of the actuators is a two orders of magnitude improvement over existing designs. Possible applications include the piston actuation of vertical micromirrors and microlenses.
We have been developing the molecular tweezers that can retrieve a minute amount of molecules from solution such as DNA. Since the retrieved molecules form a bridge between two tips of tweezers, we can examine their electrical characteristics in atmospheric condition. The bridge also serves as a scaffold for nano particles. Figure 1 shows an example of a retrieved DNA wire modified by palladium nano...
We report about profile measurements using miniaturized Michelson interferometer acting as optical probe. Two characterization techniques were deployed: FFT of spectral response and monochromatic light. Resulting profiles are compared with those obtained by commercial equipments.
Electrostatically actuated torsional micromirror fabricated using MicroElectroMechanical Systems (MEMS) technology is a fundamental building block for many optical network applications, such as optical wavelength-selective switch, configurable optical add-drop multiplexers and optical cross-connects. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous...
We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show...
This work presents a novel fabrication method for {111} dual mirror and optical bench using double-sided anisotropic wet etching of <100> oriented silicon wafer. The roughness of the wet etched {111} plane is 8 nm.
Three-dimensional patterning of gold nano-particles on SiO2 and Si substrates is performed by ion-beam lithography with 15–20 nm resolution. Realization of an on-demand achiral and chiral modifications of nano-structures are demonstrated. Simulations of optical properties of the obtained nano-architectures reveal the possibility to tailor the field enhancement both in the spatial and spectral domains,...
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.
We report an independently-addressed micro tunable cat's eye retro-reflector array. The device aims at serving as the ID tag in an optical identification system, hopefully a superior alternative to the current RFID systems. Dynamic images have been successfully generated by the tunable cat's eye array.
A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.
We present nanophotonic structures consisting of a dielectric slab waveguide with low index contrast and photonic crystals. The guided-mode resonance effect is used to implement elements with selective reflection properties. The design procedure, including numerical simulations, as well as a fabrication approach employing a focused ion beam system is described. Finally, a device layout with DBR mirrors...
We present the first ever design of bending adaptor based on transformation optics at near-infrared frequency (1550 nm). The Si-air nanograting structure with period < 0.1 λ has sufficient anisotropy for light bending by 60°.
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