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A gradient-index solid immersion lens is fabricated to approximate a distribution of refractive index matching derived from transformation optics. The simulation result has shown reduction of the ghost image and increase of the magnifying area.
Electrowetting reflective display has been widely studied since EWOD [1] was introduced. The electrowetting display has been suggested using two immiscible liquids such as colored oil and conductive liquid, normally the mixture of deionized water and some electrolytes [2]. In this case hydrophilic grid walls prevent the colored oil from spreading over the neighboring cell, and render the conducting...
In this paper, we proposed a fabrication method of a double-layer split-ring-resonator (SRR) array for metamaterials in the terahertz (THz) frequency range. Our fabrication method leads to three-dimensional metamaterials.
We report on a flexible liquid microlens actuated by electrowetting mechanism. The microlens structure is made of soft polymer and its substrate is made much thinner than the lens to reduce the stress on the lens when it is stretched on a curved surface. A low-temperature fabrication process is developed to reduce the stress in the polymer. The focal length f can be varied between −14 mm and 33 mm...
Residual stress developed during thermal processes in fabrication is ubiquitous in MEMS devices. While the residual stress is exploited in many devices to generate initial displacements of freestanding structures in the device [1–2], it can also cause severe problems during and after device fabrications. Post-development of residual stress over long term can deteriorate the performance and even fail...
The design, fabrication, and quasi-static testing of a high fill factor electrostatically actuated MEMS mirror array with application to spectrometry are presented. Mirror inclination with applied voltage is demonstrated by optical profilometry.
An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.
We propose a lens fabrication process for reaction injection molding of elastomeric micro-lenses. The versatile and flexible process allows manufacturing a broad spectrum of lens shapes, including compound achromatic lenses, entirely consisting of PDMS.
We report on polydimethlysiloxane (PDMS) microlenses fabricated from liquid-phase photopolymerization and a single molding step. The mold is fabricated by photopolymerizing a polyacrylamide (PAAm) pre-hydrogel flowed into an aperture array with a channel underneath. PAAm shrinks isotropically while pinned around the rim of the apertures to form lens molds due to hydrophobic-hydrophilic boundaries...
In this paper, we investigate the reproducibility of a fabrication method for making active microstructures as micro-actuators for optical and/or fluidic micro-components. The proposed method uses a magnetic photosensitive nanocomposite made by mixing magnetic nanoparticles into photoresist without laborious processes. In the development process, the magnetic particles are taken off from the nanocomposite,...
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