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This paper presents the design and fabrication of narrowband resonant cavity absorbers in the long wave infrared. Absorption in multiple spectral bands is demonstrated with a structure whose thermal mass is compatible with thermal detectors.
Polycrystalline ferroelectric modified lead titanate thin films have been deposited by pulsed laser deposition and annealed for pyroelectric infrared detection. The deposited thin films have been characterized for the temperature dependence of their pyroelectric parameters.
MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
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