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We demonstrate optical manipulation of 1-μm-sized polystyrene beads in a silicon-based integrated optofluidic device. The relative velocity of the optically driven microbeads is ~14.2 μm/s and ~3.5 μm/s using 0.7-μm and 0.5-μm-thick silicon nitride waveguides.
We demonstrated trapping of 6-μm polystyrene microparticles over a 253-μm range using a trapping power of ~ 7 mW at 1550 nm. The observed particle levitation and segregation offer a longe-range energy-efficient manipulation mechanism.
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