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A new low-Ar-gas-pressure (PAr) sputtering process is proposed for the preparation of granular metal-oxide films for use as perpendicular magnetic recording media. CoO and CoSi powders were used as the raw materials of the sintered target rather than SiO2 powder to obtain the O/Si ratio to 2 in a granular film under low PAr process. Strongly exchange-coupled media were obtained at PAr = 0.6 Pa using...
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