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Smart temperature sensors integrating on the same chip the solid-state sensor itself and the digital conversion present several advantages : lower cost, fewer connections, readiness of use. No such sensor exists today for high temperature applications (200-300degC). Bulk silicon implementations are limited to 160degC. The use of SOI allows us to extend significantly this range. The CMOS smart temperature...
Bulk-Si ICs cannot operate over 150degC, due to the reverse bias leakage current of the p-n junction in MOSFETs or diode components. In this paper, we investigated a work function type temperature sensor on a SOI substrate, which generates voltage output by the work function difference and is superior to diode-type temperature sensors at high temperature. This SOI temperature sensor is operated up...
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