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Cathodoluminescence (CL) spectra for Silicon Rich Oxide (SRO) films with different silicon excess and nitrogen content are measured at room temperature. The SRO was deposited by Low Pressure Chemical Vapor Deposition (LPCVD) on Si substrates, and nitrogen was introduced into SRO adding NH3 to the reactive gases. The samples were divided in two parts, one part was annealed at 1100degC. The nitrogen...
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