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Fiber-to-waveguide gold grating couplers are fabricated using UV-based nano imprint lithography and lift-off on top of an unprocessed silicon-on-insulator chip. Over 22% efficiency and a 1 dB bandwidth of 36 nm is demonstrated in the telecom band.
Processes for tooling of larger arrangements of refractive and diffractive structures on planar surfaces as well as details of the fabrication of gratings combined with lenses are discussed and examples for specific applications are shown.
We demonstrate wafer-scale fabrication by combined nanoimprint and photolithography (CNP) of integrated polymer optics, combining active and passive polymer components with nm to mm features. Distributed feed-back (DFB) polymer dye lasers are integrated with polymer waveguides. The laser devices are defined in SU-8 resist, doped with Rhodamine 6G laser dye, shaped as planar slab waveguides on a Fused...
We present the fabrication of circular grating based on nanoimprint and nano-machining process. We successfully demonstrate the nanoimprint of circular grating with pitch of 780 nm for large-area tunable hollow waveguide devices.
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