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A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was modified...
Electrospinning is a straightforward and effective technique to produce nanofiber nonwovens. In this paper, a comb ionomer of poly(ethylene covinyl alcohol) end-capped with sulfonic acid (EVOH-g-SO 3H) was synthesized by two-step synthesis process and electrospun into nonwoven membranes. The effect of processing parameters on the fibrous and beads morphology was investigated by scanning electron microscopy...
This paper proposes a novel wafer-level packaging (WLP) method at room temperature for piezoresistive pressure sensors. We use a polydimethylsiloxane (PDMS) sheet as a candidate for replacing a Pyrex glass wafer, to seal the backside V-grooved chambers of the pressure sensor chips. PDMS is a well-known material in MEMS technology recently. It is not only cheap but also has a merit of a simple process...
The bandwidth of fast steering mirror (FSM) is about several tens of hertz which is related to Tylar frequency of atmospheric turbulence, and the bandwidth of deformable mirror ranges from several tens to hundreds hertz relates to Greenwood frequency of atmospheric turbulence. According to practical experience, the ratio of fast steering mirror and deformable mirror should be from one is to five to...
The mechanical properties of sol-gel-deposited lead zirconate titanate (PZT) thin films have been studied using nanoindentation method. This permitted a determination that the sol-gel derived PZT (53/47) films display an elastic modulus, approximately 123 GPa, much higher than that of bulk PZT ~ 68 GPa. The thin films exhibit hardness between 7 and 8 GPa, slightly lower than that of bulk PZT ~ 9 GPa...
The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional poly silicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase...
A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated...
This paper presents the effect of the nanometer additive on the performance of the electrodes in secondary nickel metal hydride battery. The influence of the nanometer additive on discharge storage capacity of the electrode is studied and the electrochemical property of hydride electrode is investigated. Galvanostatic tests indicate that the nanometer additive incorporated electrode exhibits better...
Movement of aggregated chains in magnetic fluid was caused by the rotation of external magnetic field to break the laminar flow for resulting in the chaotic flow and improving the mixing efficiency of the fluid. The experiments were performed with varying strength of magnetic field, rotation frequency and flow rate using micro particle image velocimetry (micro-PIV) technique. The results show that...
Rapid technological progress has required reliable measurement techniques for velocity field in microspace, particularly in the biochip or electrochemical engineering. Research on the flow in microchannel is the foundation of the microfluidic-based biochip. In this paper, a micro-resolution particle image velocimetry (mu-PIV) system, with order of 1 mum spatial resolution for the measurement of velocity...
A facile approach to the surface oxidation of multi-walled carbon nanotubes (MWCNTs) is presented using oxidation solution to decorating MWCNTs, sonication to promote this effect and increase the population density of surface oxide groups. The sonication short time for MWCNTs oxidation /functionalization is desirable for minimizing structural damage to the MWCNTs that could lead to changes in their...
The paper presents a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media...
The design and fabrication for a novel silicon-based micro direct methanol fuel cell (mu-DMFC) of 0.64cm2 active area on <100> silicon wafer are described in this paper. The novelty of the DMFC structure is that the anodic micro channels arranged in the asymmetric mesh have been fabricated, and the first objective of the experimental trials is to verify the feasibility of the novel structure...
Sn-Ag-O thin films were deposited by DC magnetron co-sputtering in a gas mixture of Ar and O2. The microstructure and morphology of the thin films were characterized by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The Sn2.3 AgO0.9 and Sn1.3AgO0.6 film films deposited at room temperature showed a mixture of crystalline and glassy structure in XRD patterns, whereas...
This paper presents a novel microfabrication technology of micro hot embossing metal mold - no back plate growing method. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on nickel substrate...
Fraction collection following DNA electrophoresis has many applications in biology analysis. These assays typically need to identify specific DNA fragments in the separated sample for further processing and require extraction of one or a group of fragments. Unfortunately, the conventional methods involve cumbersome procedure and are not amenable to integration, automation and extraction of microscale...
The flow characteristics and heat transfer in micro couette flow were studied numerically using three methods: Burnett equations, direct simulation Monte Carlo (DSMC) method and information preservation (IP) method. The results of these three methods are compared to each other. Convergent solutions to the conventional Burnett equations with second order velocity-slip and temperature-jump boundary...
A comparative study of the micro-tribological properties of silicon-based component and octadecyltrichlorosilane (OTS) molecular lubricant film which was prepared on Si(100) substrate, and their adhesive and tribological properties were mainly investigated by AFM/LFM. Meanwhile, the effect of relative humidity and scanning velocity was taken into consideration. The results show that the adhesive force...
The paper describes an approach for preparing probes for combined SPM techniques, such as scanning electrochemical microscopy (SECM)/photoelectrochemical microscopy (PEM), SECM/near-field scanning optical microscopy (NSOM). The SECM/PEM probes were constructed firstly by stripping off a single mode optical fiber's polymer coating (125 mum diameter of cladding) at one end. The stripped optical fibers...
The plug-like fluidic profile is one of most advantages of electroosmotic flow, which influences the reproducibility, sensitivity and separation efficiency of the microfluidic devices. Electroosmotic flow in microchannels with hydraulic diameters of less than 20 microns are investigated experimentally and qualitatively compared with prediction in electric double layer (EDL) theory. Fluidic profiles...
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