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To enable MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment, this paper describes a MEMS design strategy that uses parameterized three-dimensional (3D) part features to construct geometric models of MEMS devices and then generates mask-layouts and process flows automatically. SolidWorks, an outstanding 3D design tool, is utilized to build the 3D model of...
This paper derives a closed form solution with fringing filed effects for the pull-in voltages of the micro fixed-fixed beam subjected to electrostatic loads and initial stress. The closed form solution is derived based on the Euler's beam theory and the energy method. The accuracy of the present closed form solution is verified through comparing with the experimentally measured data conducted in...
Different from the conventional piezoelectric microcantilevers with a piezoelectric film sandwiched between two metal electrodes on cantilever structures, the objective of our investigation is to develop a technology platform based on the integration of two piezoelectric PZT thin-film elements on silicon cantilevers for microsensors and microactuators. Two novel piezoelectric microcantilevers with...
MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with...
Silicon carbide (SiC) is a promising material for the device operating in hash environment, such as high temperature, high pressure or erodent environment, owning to its excellent electrical, mechanical, and chemical properties. The PECVD process allows deposition of SiC at low temperature (200degC-400degC), which makes SiC has better compatibility in Post-CMOS processes. In this paper, PECVD SiC...
After successful fabrication and characterization of the first ICP based tunneling accelerometer, we modified the fabrication process to eliminate the knife-blades on the beam, which is caused by the double mask ICP process. These changes have resulted in about 20% yields enhancement at the open-loop characterization phase. The new process also enhances the height of the proof mass without increasing...
This paper presents the effect of driving waveform for piezoelectric bend mode inkjet printhead with optimized mechanical design. Experimental and theoretical studies on the applied driving waveform versus jetting characteristics were performed. The inkjet head has been designed to maximize the droplet velocity, minimize voltage response of the actuator and optimize the firing frequency to eject ink...
This paper presents the fabrication of a micro droplet ejector for the application of digital printing system. The ejector makes the ink droplets of approximately 80 squaremum diameter on demand. The ejecting system is the type of face-shooter. The method of actuating membrane is bending mode using d31 of PZT. The size of ejector is 27.6 mm x 27.75 mm x 1.1 mm, and the pitch between nozzles is 2.54...
There are serial structuring methods invented or used for the fabrication of nano structures. However, there is an urgent need for innovative processing technologies, including hybrid methods across multiple energetic domains, and three-dimensional imaging and fabrication technologies such as ultrasonics. This paper shows a novel method of nano island lithography to shape hemispherically islands of...
A MAG-muIMU which is based on MEMS gyroscopes, accelerometers, and magnetometers is developed for real-time estimation of human hand motions. Appropriate filtering, transformation and sensor fusion techniques are combined in the ubiquitous digital writing instrument to record handwriting on any surface. In this paper, we discuss the design of an extended Kalman filter based on MAG-muIMU (micro inertial...
The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but...
In this paper, a MEMS method is developed to form suspended nano beams in 10 nm order width and thickness. The dimension of the nano beams is controlled precisely by employing traditional anisotropic self stopping etching instead of popular nano fabrication method such as e-beam lithography, which presents an opportunity for the future low cost batch product. The I-V measurements indicate that the...
In this study, basing on electrochemistry and MEMS technology we develop a novel biosensor with multi channels to detect three markers (hyaluronic acid (HA), Laminin (LN), type IV collagen (IV-C) ) so as to evaluate the liver disease. With MEMS technology, a chip including a CE, a RE and 6 gold electrodes is fabricated for detection of at most 6 markers simultaneously. Different antibodies of serum...
A new improved comprehensive 3D surface simulator is presented for different MEMS processes. The simulator consists of three parts: the common surface evolution models, 3D represent layer, and physical processes model interface. The surface evolution models including faster surface string model and material cell-removal model, function as a common 3D surface and structure generator, segment control...
In this paper we present a novel sample injection chip. Microvalves and microchannels are integrated on the chip. The valve is a passive lowpass valve that allows a liquid flow at a low flow rate and prohibits it when the flow rate exceeds a threshold. We can control the injection volume by changing the channel design. The chip consists of a channel substrate, an upper valve substrate and an under...
This paper demonstrates a low cost MEMS variable optical attenuator (VOA) with high performance for the wavelength division multiplexed (WDM) applications. Two single-mode fibers (SMFs) are used as the input and output of VOA. A shutter is actuated into the optical path by an electrostatic comb-type actuator. The device is fabricated on a single silicon wafer by a novel simple bulk-silicon micromachining...
The nano manipulation needs miniaturized microtools for minute adjustment or in situ mechanical characterization. This paper demonstrates the feasibility of using bulk silicon electro-thermal expansion micro actuator to drive a lever nano motion platform. The feasibility study includes specimen preparation and dynamic and static characteristic testing. The specimen is made up of a micro electro-thermal...
Testing of microstructure dynamics is necessary to develop reliable and marketable microelectromechanical systems (MEMS) products. A measurement system for three-dimensional motions and dynamics characterization of MEMS is presented in this paper. The system integrates phase shifting interferometry, microvision, stroboscopic illumination, and base excitation, thus is able to measure the surface shapes...
Development and preliminary characterization on the performance of a micro-bubble generator using carbon nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current...
In this paper we studied the effect of residual stress on pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area. We used the distributed model when the electrostatic pressure didn't apply at the whole of the beam and applied only in the mid-part of the beam. The model uses Euler-Bernoulli beam theory for fixed-fixed end type beams with respect to residual stress due...
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