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A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated...
The design and fabrication for a novel silicon-based micro direct methanol fuel cell (mu-DMFC) of 0.64cm2 active area on <100> silicon wafer are described in this paper. The novelty of the DMFC structure is that the anodic micro channels arranged in the asymmetric mesh have been fabricated, and the first objective of the experimental trials is to verify the feasibility of the novel structure...
The flow characteristics and heat transfer in micro couette flow were studied numerically using three methods: Burnett equations, direct simulation Monte Carlo (DSMC) method and information preservation (IP) method. The results of these three methods are compared to each other. Convergent solutions to the conventional Burnett equations with second order velocity-slip and temperature-jump boundary...
The micro-flow systems have been extensively introduced into the micro-devices in Microelectromechanical System(MEMS), and the flowing characteristics determines the performance of the micro-devices to a great extent. Here, the experiments of characteristics of distilled water flow in a series of round quartz microchannels with the diameters of 13mum, 20mum and the lengths ranging from 40 mm to 100...
A valve-less micropump with isosceles triangle cross-section nozzle-diffuser elements driven by PZT (Pb(Zr,Ti)O3) patch had been successfully fabricated by MEMS (mciro-electromechanical system) technologies. As flow rectifying elements, the nozzle-diffuser is in substitute of active check valve. Although the volume flow rate characteristics of conical, pyramidal, and flat-wall nozzle-diffuser have...
Due to the trade secrets and intellectual property, there are still many aspects of MEMS switches which are not understand well and are currently under investigation. In this paper, our report shows that MEMS can be released using O2 and a little carbon powder at the same time. The relationship between the removing polyimide time and the cure temperature is presented using carbon powder in the quartz...
A thermally driven miniature electric field sensor (MEFS) has been designed, fabricated and tested. It is mainly comprised of shielding electrodes, bent beam thermal driver, positive and negative sense electrodes and drive pads etc, the shielding electrodes are driven by a cascaded bent beam thermal driver to periodically cover or expose the positive and negative sense electrodes. The thermally driven...
Previous researches indicate that a first-order sigma-delta micromachined accelerometer can hardly achieve a high dynamic rang at an acceptable oversampling rate. We have designed a second-order sigma-delta modulator, which includes two integrators and three gains, for micromachined accelerometers. By simulation in Matlab, we have found that the system gain of the second-order sigma-delta micromachined...
This paper presents a low noise bulk micromachined gyroscope. The design of frame and independent beams reduces the mechanical coupling between the drive mode and sense mode, and facilitate the frequency match of two modes. The gyroscope with a 100-120-mum-structure thickness and an aspect ratio about 12 is fabricated by DRIE technology and silicon-glass anodic bonding, which provides a high sense...
A new optimized structure for micro electromagnetic actuator is introduced based on the research done before. Three-dimensional structure and new fabricate process is adopted accordingly in this improved design. The new structure can diminish the leak of magnetic circuit and increase the magnetic force. An electromagnetic micro actuator is fabricated based on the MEMS technology. The size of the micro...
In this paper, we provide monolithic MEMS SoC design examples by adopting high-end standard foundry processes, which would be mostly important for speeding up developments on many MEMS system applications. We have demonstrated array-type structure designs, with sensing circuit includes modulation, amplification, and filtering functions, are fabricated monolithically in a 0.35 μm Bipolar/CMOS/DMOS...
This paper presents a simulation of fluidic self-assembly using capillary force. The strong, close range attractive forces that govern the fluidic self-assembly technique are approximated by a model, which allows the application of efficient algorithms to predict system behavior. For a given volume of lubricant and binding sites design, the model predicts the assembled micro-parts self-assembly dynamic...
This paper presents the optimized design of a novel Focal Plane Array (FPA) structure for opt-mechanical uncooled infrared imaging system. The FPA structure is a bi-material micro-cantilever array which without Si substrate and with thermal isolation organ. In the paper, we build up series of model to describe the structure's IR absorb, heat exchange and thermal-mechanical characters. To optimize...
Micro-EDM milling has become one of the powerful means of 3D micromachining for MEMS. However, for micro- EDM milling, there isn't a general electrode wear compensation strategy matched to arbitrary materials of workpiece and electrode. In this paper, the machinability of platinum metal is evaluated by taking latent heat of fusion and evaporation into account firstly. And then, a general electrode...
According to the thermal-optical effect and the elasto-optical effect, the relationship of the refractive index with the temperature and the stress of the optical window in the aerodynamic environment is obtained. Based on building the model of grid, ray-tracing in optical window is carried out. Then a novel method to correct the wave-front and reduce the blurring caused by aero-optical effect is...
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly...
Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system...
The paper presents an integrated automatic micro reverse transcription polymerase chain reaction (RT-PCR) system for molecular diagnosis. The developed system can detect viruses with a high sensitivity and specificity using antibody-conjugated superparamagnetic beads. The target viruses were first captured by conjugated antibodies on the magnetic beads and then attracted by a magnetic field generated...
In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (muDMFC). Using the MEMS technology we have successfully made single muDMFC as small as 8mmtimes8mmtimes3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep...
The formation of micro-scale droplets in liquids is crucial in the emulsification process, which is commonly used for a variety of industrial applications. This paper reports a new microfluidic chip capable of generating uniform micro-droplets in liquids for emulsification applications. The microfluidic chip can generate uniform micro-droplets utilizing a novel combination of hydrodynamic focusing...
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