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This paper presents the design, simulation, fabrication and preliminary test results of a monolithic triaxial micromachined vibratory gyroscope. The device is a monolithic integration of two uniaxial in-plane (x- and y-axis) gyroscopes and one uniaxial out-of-plane (z-axis) gyroscope and the three individual gyroscopes are all actuated by electrostatic force and detected by capacitors. In order to...
Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal...
Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system...
To enable MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment, this paper describes a MEMS design strategy that uses parameterized three-dimensional (3D) part features to construct geometric models of MEMS devices and then generates mask-layouts and process flows automatically. SolidWorks, an outstanding 3D design tool, is utilized to build the 3D model of...
A differential capacitive silicon z-axis micro-accelerometer with special tethers, based on anisotropy etching, anodic bonding and DRIE (deep reactive ion etching) technology is proposed and a novel inertia structure is designed. The device with a three-layer structure can provide a variable sensitivity as changing the thickness of the beam fabricated by one set of masks. The simulation of the static...
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