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High yields of multi-walled carbon nanotubes are synthesized by chemical vapor deposition of acetylene on palladium nanoparticles supported on porous SiO2. HRTEM results reveal that the carbon nanotubes have novel conical inner structure. By changing the content of palladium in the catalyst, we obtained palladium nanoparticles with different diameter distribution. It was found that the apex angles...
Development and preliminary characterization on the performance of a micro-bubble generator using carbon nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current...
Electrowetting-on-dielectric (EWOD) is a promising method for manipulating tiny amounts of liquids. However, the miniaturization and the monolithic integration become the great challenges to improve the EWOD applications in actual lab-on-a-chip systems. In this paper, we present an IC-compatible digital microfluidic actuator, which uses silicon as the substrate and the thermally grown SiO2 film on...
Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). A solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. The basic principle is obtaining...
A new process for self-aligned double gate MOS fabrication is proposed. The milestone of this process in the revelation of a buried mask in the BOX of a SOI wafer and in a thermal oxide layer on top of active silicon film. The revelation of the buried mask makes use of the highly selective etching of implanted oxide in VHF. The etching mechanism of VHF etching of oxide is presented and the influence...
Two step acid-base catalyzed silica xerogels which had integrated structure were prepared through sol-gel and ambient pressure drying. Silica xerogels powder, TiO2 powder and short fibers were added as the additives in order to improve the properties of silica xerogels. The porous structure was estimated by the means of nitrogen adsorption method and mercury intrusion porosimetry (MIP). According...
This paper reports the development of a polycrystalline diamond (poly-C) thin film encapsulation packaging process which is integrated into the MEMS cantilever resonator fabrication. The high Young's modulus and chemical stability of poly-C make it an excellent candidate material for a thin film package. A test chip is fabricated using a 4-mask process. First, poly-C cantilever beam resonator is fabricated...
In this paper, we focus on the wide-range temperature dependence of Brillouin shift in an optical fiber. We set about our study on the basis of the material properties of fused silica, including the Young's modulus, the Poisson's ratio, the refractive index, the density and the thermal expansion coefficient. We have built up mathematical model for the temperature dependence of each of the material...
Novel local curvature test structures combined with a sub-nanometer optical interferometry measuring setup have been developed to detect stresses in nanometer-scale films as well as ultra low stresses in thin films. Stress difference as small as 1.5 MPa within a 30 nm film can be resolved with this metrology, which is among the best in the present reports. Residual stresses in thermal SiO2 and LPCVD...
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