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This paper presents a CMOS biochip for DNA detection with an embedded current amplifier circuit by using self-assembly multilayer gold nanoparticles (AuNPs). The biochip is fabricated by a TSMC 0.35 mum 2P4M standard CMOS process and post-CMOS micromachining processes. On each measuring spot, there is a pair of electrodes with a gap distance of 350 nm. Through a self-assembly process between suspended...
A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was modified...
Different from traditional detection methods including polymerase chain reaction (PCR) based assays and enzyme-linked immunosorbent assays (ELISA) which are expensive and time consuming for biochemical analysis, in our study, a DNA chip assay using gold nanoparticle (AuNP) immunological amplification method and RFID communication platform were applied to detect DNA sequences rapidly and conveniently...
Si based Ge quantum dot infrared photodetector (QDIP) has the potential of being a serious candidate for applications in optical fiber communications. In this paper, 20 periods of stacked Ge quantum dots were grown on Si(100) by gas source molecular beam epitaxy (GSMBE). Using the stacked quantum dots as active region, a P-I-N structure quantum dot infrared photodetector was fabricated. To improve...
Silicon nanostructures were fabricated by a natural lithography technique, with sizes far beyond the limit of conventional, by a self-organizing gold colloidal particle monolayer as an etch mask. The silicon nanostructures with high density and uniformity in height and shape were obtained using reactive ion etching (RIE). The uniform spatial distribution of the Si nanostructures can also be obtained...
This paper presents a simulation of fluidic self-assembly using capillary force. The strong, close range attractive forces that govern the fluidic self-assembly technique are approximated by a model, which allows the application of efficient algorithms to predict system behavior. For a given volume of lubricant and binding sites design, the model predicts the assembled micro-parts self-assembly dynamic...
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly...
In order to improve the performance of field emitters nowadays, carbon nanotubes are used instead of conventional materials such as silicon and metals. In this paper, field emission characteristics of three different multi-wall carbon nanotube films have been compared, which are fabricated by different methods, including direct growth, evaporation coating and flow assembly. The field emission current-voltage...
Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). A solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. The basic principle is obtaining...
In this work, we fabricated GaN hollow nanorods by using inductively coupled plasma (ICP) etching. We found that tops of these nanotubes were hexagonal with the c-axis perpendicular to substrate surface. We also found that density of the GaN nanorods were not strongly dependent on etching parameters, which suggests that the formation of these GaN nanotubes was related to the dislocation density in...
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