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This paper presents a nano-roughening technique to effectively modify bonding surface for ensuring for the continuation of hermetic encapsulation shrinkage from MEMS to NEMS. The roughening is realized via a non-uniform etch characteristic of PR which is etched then utilized as an etching mask for the following silicon etching process. UV adhesive bonding is utilized for the verification of the nano-roughening...
The investigation into high-performance high current ultra low dropout regulator (LDO) was described in the paper. In the circuit design, prereference is used as a method of controlling the power of circuit to minimize the effect of power variation on functional block parameter, thus achieving the goal of enhancing voltage regulation. In the layout design, trim design for bandgap reference source...
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly...
Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system...
MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with...
We report on electrophoretic alignment of ZnO nanobelt bunches and their electrical and optical properties. The nanobelts were trapped onto a pair of electrodes by using alternating electrical current at frequency between 5 ~ 50 MHz and peak-to-peak amplitude from 2 to 20 V. Their electrical transport properties associated with the photoelectricity were studied at room temperature in the air ambient...
There are serial structuring methods invented or used for the fabrication of nano structures. However, there is an urgent need for innovative processing technologies, including hybrid methods across multiple energetic domains, and three-dimensional imaging and fabrication technologies such as ultrasonics. This paper shows a novel method of nano island lithography to shape hemispherically islands of...
Functionalized quantum dots have been successfully attached to multi-walled carbon nanotubes over carbodiimide-assisted coupling. Characterization in a transmission electron microscope shows the quantum dots are attached mainly at the opened tips and defect sites on the side-walls of nanotubes, suggesting the covalent nature of the bonding and high selectivity to chemically reactive sites. Due to...
In recent years, interest in the thermal-hydraulics at micro/nano scale keeps increasingly growing owning to the rapid technology thus enabled. It was now accepted that the classical thermal or fluidic theories working well for "macro bulk systems" may become invalid for micro/nano scale geometry. On the contrary, some phenomena seldom occur in the large scale may frequently happen as a...
Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic...
In recent years, high resolution metrology up to nano-scale has attracted substantial attention due to the increasing need of ultra precision measurement systems for MEMS and NEMS calibration. In this paper, an analytical and numerical investigation for the proposed design of a 6-degree-of-freedom (6-dof) universal ultra precision metrology system using relatively simple and inexpensive but highly...
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