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This paper reports the fabrication technology and testing of polycrystalline diamond (poly-C) mechanical resonators with dimensions as small as 100 nm for the first time. The fabricated structures include cantilever structures patterned using electron beam lithography to have widths of 100 nm, and torsional paddle resonators with a support beam width of 0.5 mum, which sustained a proof mass around...
Due to novel mechanical and electrical properties of nanomaterials, such as carbon nanotubes and semiconducting oxide nanobelts, utilizing nanomaterials in micro electromechanical structure to improve performances of sensors has attracted many interests. In this paper, we report a novel micro/nano cantilever structure applying to sense accelerations based on resonant detection. The structure is comprised...
The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but...
Described in this paper is a novel method to fabricate the isolated nano-beams in the normal (111) Si wafers. The cantilever and the double clamped beams with nano thickness are anchored through the metal wires, which are isolated to the substrate electrically. The thickness of the beams is determined by dry etching. The beams are released by KOH etching. As the bottom of the beams is (111) plane,...
This paper introduces a novel wafer-level hermetic packaging technology for MEMS based on Cu/Sn isothermal solidification (IS) technology. We designed the structure of the intermediate multilayer and the pattern of sealing rings, optimized the bonding process, and analyzed some key factors affecting the hermeticity, such as the dimension of the sealing rings. Successful Cu/Sn IS bonding was realized...
Piezoelectric resonators have widely been utilized not only for time keeping devices but also for temperature measurement sensors. In order to obtain a temperature sensor having low power consumption, low cost, fast response, high sensitivity and high precision, resonance frequency of quartz tuning fork crystal for use in temperature sensor was analyzed by the finite element method (FEM). FEM was...
This paper reports the development of a polycrystalline diamond (poly-C) thin film encapsulation packaging process which is integrated into the MEMS cantilever resonator fabrication. The high Young's modulus and chemical stability of poly-C make it an excellent candidate material for a thin film package. A test chip is fabricated using a 4-mask process. First, poly-C cantilever beam resonator is fabricated...
Experiment researches on multi-folded-suspension resonators are made by four kinds of resonators with different structure parameters. It is found that the resonance amplitude can be about 10 micron in open air by a peak to peak 48V AC driving voltage without DC bias voltages. And a non-transverse resonance has been observed in the experiment. It is found that the frequencies of AC voltage are just...
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