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Described in this paper is a novel method to fabricate the isolated nano-beams in the normal (111) Si wafers. The cantilever and the double clamped beams with nano thickness are anchored through the metal wires, which are isolated to the substrate electrically. The thickness of the beams is determined by dry etching. The beams are released by KOH etching. As the bottom of the beams is (111) plane,...
Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic...
Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed,...
Most of the biosensors are based on the enzymatic electrochemical analysis and are disposable due to the use of the enzymes that are living creatures. Thus, these are limited to the in-vivo and handheld continuous monitoring sensor system applications. In this paper, a nano-hole (mesoporous) arrayed Pt electrode is investigated for developing the non-disposable electrochemical sensors without using...
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