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In order to efficiently scale down RF circuits it is necessary also to decrease the size of the inductors. The ultimate limit of this miniaturization would be an RF circuit consisting of nano-scaled inductors. Meander nanoinductors presented in this work were fabricated by electron beam lithography. Their performance was investigated by electromagnetic simulation software. It was found that inductance...
This paper presents the design, fabrication and first experimental results of a dual-band switchable band-pass filter structure for the selection of DCS 1800 and WLAN standards. The design approach makes use of intensive electromagnetic modelling and layout optimisation. The fabrication technology is based on bulk and surface silicon micromachining to manufacture lumped elements on high resistivity...
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