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Liquid properties can be studied through monitoring the in-liquid resonant behavior of micromechanical oscillators. This paper presents the first attempt to implement capacitively transduced micromechanical oscillators in a complementary metal-oxide-semiconductor (CMOS) process for in-liquid operation. The parallel-plate drive and sense capacitors have a 2-$\mu \text{m}$ gap and 1-$\mu \text{m}$ ...
This paper reports the design and characterization of a phase-locked loop-based control scheme implemented in a complementary metal–oxide–semiconductor process for resonance matching between capacitive micro-resonators. The system-on-chip implementation can be utilized for calibrating individual resonance in a large sensor array or matching the drive and sense modes for micromachined vibratory gyroscopes...
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