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This paper presents a performance investigation of a wearable distributed-deflection sensor in arterial pulse waveform measurement. Built on a flexible substrate, the sensor entails a polymer microstructure embedded with an electrolyte-enabled resistive transducer array. By pressing the sensor against an artery with hold-down pressure exerted by two fingers, the pulse signal from the artery deflects...
The transmit and receive sensitivity of the capacitive micromachined ultrasonic transducer (CMUT) is proportional to the active device capacitance formed by the vacuum gap of the device, and an insulation layer between the gap and the device electrode. In the sacrificial release process of CMUT fabrication, this insulation layer cannot be made arbitrarily thin due to conformality issues. In this paper,...
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