The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper, we present the electrical characterization of the nonlinear tapping mode of the nanorelays capacitively transduced. Such a characterization is carried out utilizing three-terminal tungsten CMOS-NEM relays. Exciting electrostatically the switching devices near its resonance and detecting its movement by means of capacitive detection, we reveal double-side frequency dynamic-contact characteristics...
This paper reports the design and characterization of a phase-locked loop-based control scheme implemented in a complementary metal–oxide–semiconductor process for resonance matching between capacitive micro-resonators. The system-on-chip implementation can be utilized for calibrating individual resonance in a large sensor array or matching the drive and sense modes for micromachined vibratory gyroscopes...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.