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In order to give full play the unique advantage of micro-opto-eclectro-mechanical system (MOEMS) sensor, one novel low-cost plate-type MOEMS uniaxial vibration sensor based on metal etching and fiber collimator technique is proposed and studied in this paper. Core vibration element of the MOEMS vibration sensor is fabricated by the metal etching technique, and its fiber collimator instrument is made...
In this paper, ultrasonic sensor based on multimode interference in single-mode–multimode–single-mode optic fiber structure for non-contact displacement measurement is presented and investigated. By experimentally testing and optimizing the sensor structure, an ultrasonic wave with a frequency of 25 kHz can be sensitively detected with a 7 m non-contact detection distance. Displacement measurement...
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