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Nanocrystallyne n-ZnO and p-TiO2 thin films were deposited on crystalline Si substrate by the simple and low-cost sol-gel method. The surfaces of nanocrystalline ZnO and TiO2 were modified by PdCl2 solution to passivate the defect states and to improve the gas sensitivity. Both unmodified and Pd modified sensors with Pd–Ag/n-ZnO/p-Si/Al and Pd–Ag/p-TiO2/p-Si/Al device structures were exposed to different...
A highly sensitive hydrogen gas sensor has been developed utilizing 3% copper-doped zinc oxide thin films. These films were deposited using pulsed laser deposition technique on quartz substrates with predeposited interdigitated platinum electrodes. The deposited films were characterized by X-ray diffraction and atomic force microscopy. The hydrogen sensing properties of the sensor were studied at...
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