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The wavelength shift of single Bragg grating integrated into a waveguide in optical MEMS pressure sensors gives inaccurate result due to the cross sensitivity caused by multiple external factors including temperature. Novel dual waveguide Bragg gratings (WBGs)-based microelectromechanical system pressure sensors with silicon micromachined diaphragm are presented here. The sensor consists of a curved...
We have proposed and analyzed a compact refractive index sensor in 2-D plasmonic waveguide by hexagonal-ring cavity. The metal–insulator–metal waveguides are coupled to a cavity that is filled with liquid/gaseous material under sensing of refractive index. According to the linear relationship, the refractive index changes of the dielectric material inside the cavity and temperature changes of environment...
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