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A thermo-mechanical MEMS detector with 35-μm pixel pitch is designed, fabricated, and characterized. This fabricated design has one of the smallest pixel sizes among the IR thermo-mechanical MEMS sensors in the literature. The working principle of the MEMS detector is based on the bimaterial effect that creates a deflection when exposed to IR radiation in the 8–12-μm waveband. The nanometer level...
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