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For the first time, a bimorph thin film lead zirconate titanate (PZT) micro-actuator with thick polysilicon as a passive structural layer is reported. A simple micro-cantilever actuator consisting of 1000 µm long and 250 µm wide with 4 µm thick polysilicon structure flanked by a piezoelectric active layer on the top and bottom side has been fabricated to demonstrate such novel bimorph configuration...
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