Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2015 > 24 > 5 > 1647 - 1658
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 2019 - 2026
Journal of Microelectromechanical Systems > 2015 > 24 > 5 > 1647 - 1658
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 2019 - 2026