Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 522 - 530
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 705 - 714
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 641 - 651
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 531 - 538
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 626 - 640
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 588 - 596
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 501 - 510