Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 616 - 625
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 539 - 546
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 531 - 538
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 501 - 510