Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1061 - 1068
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 801 - 809
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1061 - 1068
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 801 - 809