Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1311 - 1320
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1303 - 1310
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1311 - 1320
Journal of Microelectromechanical Systems > 2012 > 21 > 6 > 1303 - 1310