Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 632 - 642
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 691 - 703
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 632 - 642
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 691 - 703