Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 570 - 576
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 588 - 596
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 570 - 576
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 588 - 596