Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 679 - 694
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 597 - 609
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 577 - 587
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 641 - 651
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 652 - 659
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 725 - 735
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 660 - 670