Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 294 - 301
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 284 - 293
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 294 - 301
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 284 - 293