Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 443 - 450
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 316 - 323
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 443 - 450
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 316 - 323