Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 308 - 315
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 324 - 330
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 308 - 315
Journal of Microelectromechanical Systems > 2012 > 21 > 2 > 324 - 330