Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 319 - 332
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 742 - 754
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 618 - 625
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 537 - 544
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 528 - 530
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 810 - 821
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 931 - 939
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1052 - 1060
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1185 - 1192
Journal of Microelectromechanical Systems > 2015 > 24 > 5 > 1436 - 1452
Journal of Microelectromechanical Systems > 2015 > 24 > 5 > 1462 - 1470
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 1684 - 1686
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 1887 - 1895
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 2083 - 2091
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 2170 - 2177
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 1695 - 1702
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 1759 - 1767
Journal of Microelectromechanical Systems > 2015 > 24 > 6 > 1730 - 1740